Robust Substrate-based Micromachining Techniques And Their Application To Micromachined Sensors And Actuators
Author(s)
Advisor(s)
Editor(s)
Collections
Supplementary to:
Permanent Link
Abstract
The use of robust substrates on the surface micro-machined structures combines (1) the use of micro-machining technology; (2) the use of electronic packaging technologies; and (3) the use of conventional machining techniques to create a new class of micro-machined structures. A particular robust substrate-based micro-machine structure is a capacitive pressure sensor that includes a pressure sensitive diaphragm and an electrode.
Sponsor
Date
10/1/2002
Extent
Resource Type
Text
Resource Subtype
Patent