Organic film and contaminant removal from surfaces in the manufacture of integrated circuits

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chavez_kristi_l_200012_phd_589817.pdf (14.13 MB)
Author(s)
Chavez, Kristi Lynn
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Organizational Unit
School of Chemical and Biomolecular Engineering
School established in 1901 as the School of Chemical Engineering; in 2003, renamed School of Chemical and Biomolecular Engineering
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Supplementary to:
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http://hdl.handle.net/1853/11868
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Date
2000-12
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240 bytes
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Text
Resource Subtype
Dissertation
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