Title:
Section topographic characterization of strains accompanying dicing of silicon
Section topographic characterization of strains accompanying dicing of silicon
| dc.contributor.author | Stock, Stuart R. | en_US |
| dc.contributor.corporatename | Georgia Institute of Technology. School of Materials Science and Engineering | en_US |
| dc.contributor.corporatename | Georgia Institute of Technology. Office of Sponsored Programs | |
| dc.contributor.corporatename | Georgia Institute of Technology. Office of Sponsored Programs | |
| dc.date.accessioned | 2006-05-11T15:25:49Z | |
| dc.date.available | 2006-05-11T15:25:49Z | |
| dc.date.issued | 1998 | en_US |
| dc.description | Issued as final report | en_US |
| dc.format.extent | 8428255 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.uri | http://hdl.handle.net/1853/9602 | |
| dc.language.iso | en_US | |
| dc.publisher | Georgia Institute of Technology | en_US |
| dc.relation.ispartofseries | School of Materials Science and Engineering ; Project no. E-18-T09 | en_US |
| dc.subject | Silicon | en_US |
| dc.subject | Integrated circuits Wafer-scale integration | en_US |
| dc.title | Section topographic characterization of strains accompanying dicing of silicon | en_US |
| dc.type | Text | |
| dc.type.genre | Technical Report | |
| dspace.entity.type | Publication | |
| local.contributor.corporatename | School of Materials Science and Engineering | |
| relation.isOrgUnitOfPublication | 21b5a45b-0b8a-4b69-a36b-6556f8426a35 |
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