Title:
Modeling and controlling thermoChemical nanoLithography
Modeling and controlling thermoChemical nanoLithography
Author(s)
Carroll, Keith Matthew
Advisor(s)
Curtis, Jennifer E.
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Abstract
Thermochemical Nanolithography (TCNL) is a scanning probe
microscope (SPM) based lithographic technique modified with a
semi-conducting cantilever. This cantilever is capable of locally
heating a surface and with a well-engineered substrate, this spatially
confined heating induces chemical or physical transformation. While
previous works focused primarily on proof of principle and binary
studies, there is limited research on controlling and understanding the
underlying mechanisms governing the technique. In this thesis, a
chemical kinetics model is employed to explain the driving mechanisms
and to control the technique. The first part focuses on studying
surface reactions. By coupling a thermally activated organic polymer
with fluorescence microscopy, the chemical kinetics model is not only
verified but also applied to control the surface reactions. The work is
then expanded to include 3D effects, and some preliminary results are
introduced. Finally, applications are discussed.
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Date Issued
2013-11-13
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Resource Type
Text
Resource Subtype
Dissertation