Title:
Method for Frequency Trimming a Microelectromechanical Resonator
Method for Frequency Trimming a Microelectromechanical Resonator
| dc.contributor.patentcreator | Hamelin, Benoit | |
| dc.contributor.patentcreator | Ayazi, Farrokh | |
| dc.date.accessioned | 2022-07-08T14:21:09Z | |
| dc.date.available | 2022-07-08T14:21:09Z | |
| dc.date.filed | 1/19/2018 | |
| dc.date.issued | 3/16/2021 | |
| dc.description.abstract | Embodiments of the present disclosure can include a method for frequency trimming a microelectromechanical resonator, the resonator comprising a substrate and a plurality of loading elements layered on a surface of the substrate, the method comprising: selecting a first loading element of the plurality of loading elements, the first loading element being layered on a surface of a region of interest of the substrate; heating the first loading element and substrate within the region of interest to a predetermined temperature using an optical energy source, causing the first loading element to diffuse into the substrate; and cooling the region of interest to form a eutectic composition layer bonding the loading element and the substrate within the region of interest. | |
| dc.description.assignee | Georgia Tech Research Corporation | |
| dc.identifier.cpc | B81C 1/0065 | |
| dc.identifier.cpc | B23K 26/0006 | |
| dc.identifier.cpc | B23K 26/20 | |
| dc.identifier.patentapplicationnumber | US 15/875,943 | |
| dc.identifier.patentnumber | 10947111 | |
| dc.identifier.uri | http://hdl.handle.net/1853/66999 | |
| dc.title | Method for Frequency Trimming a Microelectromechanical Resonator | |
| dspace.entity.type | Publication | |
| local.contributor.corporatename | Georgia Institute of Technology | |
| local.relation.ispartofseries | Georgia Tech Patents | |
| relation.isOrgUnitOfPublication | cc30e153-7a64-4ae2-9b1d-5436686785e3 | |
| relation.isSeriesOfPublication | 0f49c79d-4efb-4bd9-b060-5c7f9191b9da |
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