Title:
Highly Tunable Low-Impedance Capacitive Micromechanical Resonators, Oscillators, And Processes Relating Thereto

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dc.contributor.patentcreator Ho, Gavin Kar-Fai
dc.contributor.patentcreator Ayazi, Farrokh
dc.contributor.patentcreator Pourkamali, Siavash
dc.contributor.patentcreator Sundaresan, Krishnakumar
dc.date.accessioned 2017-05-12T14:28:38Z
dc.date.available 2017-05-12T14:28:38Z
dc.date.filed 10/15/2005
dc.date.issued 3/31/2009
dc.description.abstract Disclosed are capacitive micromechanical resonators optimized for high Q, low motional impedance, and large tuning range. Exemplary resonators were fabricated using a HARPSS-on-SOI process, and demonstrated quality factors up to 119000 in vacuum. For resonators operating between 3 MHz and 30 MHz, the lowest extracted impedance is 218 kΩ and the largest electrostatic tuning coefficient is -240 ppm/V2. The disclosed designs are applicable up to at least 200 MHz operation. An oscillator interface circuit comprising of a trans-impedance amplifier and an automatic bias generator providing a temperature-compensating bias voltage is also disclosed. Experiments show temperature drift reduction from 2800 ppm to 39 ppm over a 100° C. range. Process compensation (DFM) of micromechanical resonators, resonators having mass loading elements that allow generation of closely spaced frequencies, and coupled systems comprising of the resonators are also described.
dc.description.assignee Georgia Tech Research Corp.
dc.identifier.cpc H03B5/30
dc.identifier.cpc H03H9/02244
dc.identifier.cpc H03H9/02338
dc.identifier.patentapplicationnumber 11/251197
dc.identifier.patentnumber 7511870
dc.identifier.uri http://hdl.handle.net/1853/57790
dc.identifier.uspc 359/237
dc.title Highly Tunable Low-Impedance Capacitive Micromechanical Resonators, Oscillators, And Processes Relating Thereto
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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