Title:
Fabrication and modeling of electrostatic actuators for high frequency applications

Thumbnail Image
Authors
Chinthakindi, Anil Kumar
Authors
Advisors
Kohl, Paul A.
Allen, Sue Ann Bidstrup
Advisors
Person
Associated Organizations
Series
Supplementary to
Abstract
Sponsor
Date Issued
2001-05
Extent
243 bytes
Resource Type
Text
Resource Subtype
Thesis
Rights Statement
Access restricted to authorized Georgia Tech users only.
Rights URI