Fabrication and modeling of electrostatic actuators for high frequency applications

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chinthakindi_anil_k_200105_ms_610501.pdf (15.95 MB)
Author(s)
Chinthakindi, Anil Kumar
Advisor(s)
Allen, Sue Ann Bidstrup
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Associated Organization(s)
Organizational Unit
School of Chemical and Biomolecular Engineering
School established in 1901 as the School of Chemical Engineering; in 2003, renamed School of Chemical and Biomolecular Engineering
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Series
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Theses and Dissertations
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http://hdl.handle.net/1853/11170
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Date
2001-05
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243 bytes
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Text
Resource Subtype
Thesis
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