Title:
Invited Article: Simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy

dc.contributor.author Beechem, Thomas
dc.contributor.author Graham, Samuel
dc.contributor.author Kearney, Sean P.
dc.contributor.author Phinney, Leslie M.
dc.contributor.author Serrano, Justin R.
dc.contributor.corporatename Georgia Institute of Technology. Center for Organic Photonics and Electronics
dc.contributor.corporatename Georgia Institute of Technology. School of Mechanical Engineering
dc.date.accessioned 2012-12-04T23:50:14Z
dc.date.available 2012-12-04T23:50:14Z
dc.date.issued 2007-06
dc.description © 2007 American Institute of Physics. The electronic version of this article is the complete one and can be found at: http://dx.doi.org/10.1063/1.2738946 en_US
dc.description DOI: 10.1063/1.2738946
dc.description.abstract Analysis of the Raman Stokes peak position and its shift has been frequently used to estimate either temperature or stress in microelectronics and microelectromechanical system devices. However, if both fields are evolving simultaneously, the Stokes shift represents a convolution of these effects, making it difficult to measure either quantity accurately. By using the relative independence of the Stokes linewidth to applied stress, it is possible to deconvolve the signal into an estimation of both temperature and stress. Using this property, a method is presented whereby the temperature and stress were simultaneously measured in doped polysilicon microheaters. A data collection and analysis method was developed to reduce the uncertainty in the measured stresses resulting in an accuracy of ±40 MPa for an average applied stress of −325 MPa and temperature of 520 °C. Measurement results were compared to three-dimensional finite-element analysis of the microheaters and were shown to be in excellent agreement. This analysis shows that Raman spectroscopy has the potential to measure both evolving temperature and stress fields in devices using a single optical measurement. en_US
dc.identifier.citation Beechem, Thomas; Graham, Samuel; Kearney, Sean P.; Phinney, Leslie M. and Serrano, Justin R., "Invited Article: Simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy," Review of Scientific Instruments, 78, 6, (June 2007). en_US
dc.identifier.doi 10.1063/1.2738946
dc.identifier.issn 0034-6748 (print)
dc.identifier.issn 1089-7623 (online)
dc.identifier.uri http://hdl.handle.net/1853/45498
dc.language.iso en_US en_US
dc.publisher Georgia Institute of Technology en_US
dc.publisher.original American Institute of Physics
dc.subject Micromechanical devices en_US
dc.subject Raman spectra en_US
dc.subject Finite element analysis en_US
dc.title Invited Article: Simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy en_US
dc.type Text
dc.type.genre Article
dspace.entity.type Publication
local.contributor.author Graham, Samuel
local.contributor.corporatename Center for Organic Photonics and Electronics
relation.isAuthorOfPublication cf62405d-2133-40a8-b046-bce4a3443381
relation.isOrgUnitOfPublication 43f8dc5f-0678-4f07-b44a-edbf587c338f
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