Resonant MEMS

Brand, Oliver

Title:

Resonant MEMS

dc.contributor.author	Brand, Oliver
dc.contributor.corporatename	Georgia Institute of Technology. Institute for Electronics and Nanotechnology	en_US
dc.contributor.corporatename	Georgia Institute of Technology. School of Electrical and Computer Engineering	en_US
dc.date.accessioned	2015-12-14T15:03:23Z
dc.date.available	2015-12-14T15:03:23Z
dc.date.issued	2015-12-08
dc.description	Presented a lecture at the Nano@Tech Meeting on December 8, 2015 at 12:00 p.m. in the Microelectronics Research Center, room 102 A/B.	en_US
dc.description	Oliver Brand is a Professor in the School of Electrical and Computer Engineering and the Executive Director of the Institute for Electronics and Nanotechnology {IEN) at the Georgia Institute of Technology. His research interes are in the areas of integrated microsystems, microsensors, MEMS fabrication technologies, and microsystem packaging.
dc.description	Runtime: 58:35 minutes
dc.description.abstract	The presentation discusses resonant MEMS and, in particular, resonant microsensors, in which the measurand affects a characteristic of the resonance behavior of a microstructure, such as its resonance frequency or quality factor. The seminar will cover the theoretical background of resonant MEMS and discuss different ways of how the measurand can interact with the resonance characteristics of a MEMS structure. The resonant MEMS concepts will be explained using a number of examples, including chemical sensors and magnetic field sensors.	en_US
dc.embargo.terms	null	en_US
dc.format.extent	58:35 minutes
dc.identifier.uri	http://hdl.handle.net/1853/54232
dc.language.iso	en_US	en_US
dc.publisher	Georgia Institute of Technology	en_US
dc.relation.ispartofseries	Nano@Tech Lecture Series
dc.subject	MEMS	en_US
dc.subject	Microsensors	en_US
dc.subject	Nanotechnology	en_US
dc.title	Resonant MEMS	en_US
dc.type	Moving Image
dc.type.genre	Lecture
dspace.entity.type	Publication
local.contributor.author	Brand, Oliver
local.contributor.corporatename	Institute for Electronics and Nanotechnology (IEN)
local.relation.ispartofseries	Nano@Tech Lecture Series
relation.isAuthorOfPublication	4c1c5d47-fca8-482d-87f5-992c88bd5631
relation.isOrgUnitOfPublication	5d316582-08fe-42e1-82e3-9f3b79dd6dae
relation.isSeriesOfPublication	accfbba8-246e-4389-8087-f838de8956cf