Title:
Three-dimensional Nanoscale Metrology Using Firat Probe

dc.contributor.patentcreator Degertekin, Fahrettin L.
dc.date.accessioned 2017-05-12T14:29:20Z
dc.date.available 2017-05-12T14:29:20Z
dc.date.filed 3/26/2010
dc.date.issued 9/11/2012
dc.description.abstract In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure and the detection surface, wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, thereby changing the first distance over a selected portion of the gap, the change in distance at the selected portion orienting a probe tip of the force sensor for multi-directional measurement.
dc.description.assignee Georgia Tech Research Corporation
dc.identifier.cpc B82Y35/00
dc.identifier.cpc G01Q20/02
dc.identifier.cpc G01Q20/04
dc.identifier.patentapplicationnumber 12/732991
dc.identifier.patentnumber 8261602
dc.identifier.uri http://hdl.handle.net/1853/58078
dc.identifier.uspc 73/105
dc.title Three-dimensional Nanoscale Metrology Using Firat Probe
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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