Title:
Asymmetric Membrane CMUT Devices And Fabrication Methods

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dc.contributor.patentcreator Degertekin, Levent F.
dc.date.accessioned 2017-05-12T14:25:56Z
dc.date.available 2017-05-12T14:25:56Z
dc.date.filed 1/11/2010
dc.date.issued 2/12/2013
dc.description.abstract Asymmetric membrane capacitive micromachined ultrasonic transducer ("cMUT") devices and fabrication methods are provided. In a preferred embodiment, a cMUT device according to the present invention generally comprises a membrane having asymmetric properties. The membrane can have a varied width across its length so that its ends have different widths. The asymmetric membrane can have varied flex characteristics due to its varied width dimensions. In another preferred embodiment, a cMUT device according to the present invention generally comprises an electrode element having asymmetric properties. The electrode element can have a varied width across its length so that its ends have different widths. The asymmetric electrode element can have different reception and transmission characteristics due to its varied width dimensions. In another preferred embodiment, a mass load positioned along the membrane can alter the mass distribution of the membrane. Other embodiments are also claimed and described.
dc.description.assignee Georgia Tech Research Corporation
dc.identifier.cpc B06B1/0292
dc.identifier.patentapplicationnumber 12/685581
dc.identifier.patentnumber 8372011
dc.identifier.uri http://hdl.handle.net/1853/56736
dc.identifier.uspc 600/467
dc.title Asymmetric Membrane CMUT Devices And Fabrication Methods
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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