Title:
Comb-Driven Substrate Decoupled Annulus Pitch/Roll Baw Gyroscope with Slanted Quadrature Tuning Electrode
Comb-Driven Substrate Decoupled Annulus Pitch/Roll Baw Gyroscope with Slanted Quadrature Tuning Electrode
| dc.contributor.patentcreator | Wen, Haoran | |
| dc.contributor.patentcreator | Ayazi, Farrokh | |
| dc.date.accessioned | 2022-07-08T14:21:36Z | |
| dc.date.available | 2022-07-08T14:21:36Z | |
| dc.date.filed | 10/28/2016 | |
| dc.date.issued | 10/5/2021 | |
| dc.description.abstract | A bulk acoustic wave resonator apparatus includes a resonator member, at least one anchor structure coupling the resonator member to a substrate, and a comb-drive element connected to the resonator member. The comb-drive element includes first comb fingers protruding from the resonator member, and second comb fingers of a different material than the first comb fingers interdigitated with the first comb fingers to define sub-micron capacitive gaps therebetween. Respective sidewalls of the first comb fingers are oppositely-tapered relative to respective sidewalls of the second comb fingers along respective lengths thereof, such that operation of the comb-drive element varies the sub-micron capacitive gaps at the respective sidewalls thereof. Related devices and fabrication methods are also discussed. | |
| dc.description.assignee | Georgia Tech Research Corporation | |
| dc.identifier.cpc | G01C 19/5698 | |
| dc.identifier.cpc | B81B 2201/033 | |
| dc.identifier.cpc | B81B 2203/0136 | |
| dc.identifier.patentapplicationnumber | US 15/771,453 | |
| dc.identifier.patentnumber | 11137250 | |
| dc.identifier.uri | http://hdl.handle.net/1853/67055 | |
| dc.title | Comb-Driven Substrate Decoupled Annulus Pitch/Roll Baw Gyroscope with Slanted Quadrature Tuning Electrode | |
| dspace.entity.type | Publication | |
| local.contributor.corporatename | Georgia Institute of Technology | |
| local.relation.ispartofseries | Georgia Tech Patents | |
| relation.isOrgUnitOfPublication | cc30e153-7a64-4ae2-9b1d-5436686785e3 | |
| relation.isSeriesOfPublication | 0f49c79d-4efb-4bd9-b060-5c7f9191b9da |
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