Title:
Comb-Driven Substrate Decoupled Annulus Pitch/Roll Baw Gyroscope with Slanted Quadrature Tuning Electrode
Comb-Driven Substrate Decoupled Annulus Pitch/Roll Baw Gyroscope with Slanted Quadrature Tuning Electrode
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Abstract
A bulk acoustic wave resonator apparatus includes a resonator member, at least one anchor structure coupling the resonator member to a substrate, and a comb-drive element connected to the resonator member. The comb-drive element includes first comb fingers protruding from the resonator member, and second comb fingers of a different material than the first comb fingers interdigitated with the first comb fingers to define sub-micron capacitive gaps therebetween. Respective sidewalls of the first comb fingers are oppositely-tapered relative to respective sidewalls of the second comb fingers along respective lengths thereof, such that operation of the comb-drive element varies the sub-micron capacitive gaps at the respective sidewalls thereof. Related devices and fabrication methods are also discussed.
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Date Issued
10/5/2021