Title:
Method And Apparatus For The Ultrasonic Actuation Of The Cantilever Of A Probe-based Instrument

dc.contributor.patentcreator Degertekin, Levent F.
dc.date.accessioned 2017-05-12T14:27:59Z
dc.date.available 2017-05-12T14:27:59Z
dc.date.filed 3/12/2002
dc.date.issued 8/24/2004
dc.description.abstract The cantilever of a probe-based metrology instrument such as an AFM is deflected by directing a beam of ultrasonic energy at the cantilever to apply ultrasonically generated acoustic radiation pressure to the cantilever. The energy is generated by an ultrasonic actuator such as a ZnO transducer driven by a power source such an RF signal generator. The transmitted beam preferably is shaped by focusing, collimation, or the like so that it impinges at least primarily on a region of interest of the cantilever such as the free end. The ultrasonic actuator produces a much better controlled force on the cantilever than can be achieved through the use of a traditional piezoelectric actuator and, accordingly, produces a response free of spurious effects (at least when the cantilever is operating in liquid). It also has a frequency bandwidth in the MHz range.
dc.description.assignee Georgia Tech Research Corporation
dc.identifier.cpc B82Y35/00
dc.identifier.cpc G01N29/0681
dc.identifier.cpc G01N29/2456
dc.identifier.patentapplicationnumber 10/095850
dc.identifier.patentnumber 6779387
dc.identifier.uri http://hdl.handle.net/1853/57538
dc.identifier.uspc 73/105
dc.title Method And Apparatus For The Ultrasonic Actuation Of The Cantilever Of A Probe-based Instrument
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
Files
Original bundle
Now showing 1 - 1 of 1
Thumbnail Image
Name:
6779387.pdf
Size:
1.03 MB
Format:
Adobe Portable Document Format
Description: