Title:
Method And Apparatus For The Ultrasonic Actuation Of The Cantilever Of A Probe-based Instrument
Method And Apparatus For The Ultrasonic Actuation Of The Cantilever Of A Probe-based Instrument
dc.contributor.patentcreator | Degertekin, Levent F. | |
dc.date.accessioned | 2017-05-12T14:27:59Z | |
dc.date.available | 2017-05-12T14:27:59Z | |
dc.date.filed | 3/12/2002 | |
dc.date.issued | 8/24/2004 | |
dc.description.abstract | The cantilever of a probe-based metrology instrument such as an AFM is deflected by directing a beam of ultrasonic energy at the cantilever to apply ultrasonically generated acoustic radiation pressure to the cantilever. The energy is generated by an ultrasonic actuator such as a ZnO transducer driven by a power source such an RF signal generator. The transmitted beam preferably is shaped by focusing, collimation, or the like so that it impinges at least primarily on a region of interest of the cantilever such as the free end. The ultrasonic actuator produces a much better controlled force on the cantilever than can be achieved through the use of a traditional piezoelectric actuator and, accordingly, produces a response free of spurious effects (at least when the cantilever is operating in liquid). It also has a frequency bandwidth in the MHz range. | |
dc.description.assignee | Georgia Tech Research Corporation | |
dc.identifier.cpc | B82Y35/00 | |
dc.identifier.cpc | G01N29/0681 | |
dc.identifier.cpc | G01N29/2456 | |
dc.identifier.patentapplicationnumber | 10/095850 | |
dc.identifier.patentnumber | 6779387 | |
dc.identifier.uri | http://hdl.handle.net/1853/57538 | |
dc.identifier.uspc | 73/105 | |
dc.title | Method And Apparatus For The Ultrasonic Actuation Of The Cantilever Of A Probe-based Instrument | |
dc.type | Text | |
dc.type.genre | Patent | |
dspace.entity.type | Publication | |
local.contributor.corporatename | Georgia Institute of Technology | |
local.relation.ispartofseries | Georgia Tech Patents | |
relation.isOrgUnitOfPublication | cc30e153-7a64-4ae2-9b1d-5436686785e3 | |
relation.isSeriesOfPublication | 0f49c79d-4efb-4bd9-b060-5c7f9191b9da |
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