Title:
Porous Insulating Compounds And Method For Making Same
Porous Insulating Compounds And Method For Making Same
dc.contributor.patentcreator | Kohl, Paul A. | |
dc.date.accessioned | 2017-05-12T14:27:36Z | |
dc.date.available | 2017-05-12T14:27:36Z | |
dc.date.filed | 6/4/1999 | |
dc.date.issued | 12/19/2000 | |
dc.description.abstract | A method of forming a porous insulating composition comprising the steps of (A) providing at least one organic sacrificial material/dielectric material composition comprising at least one organic sacrificial material and at least one dielectric material; and (B) removing the at least one organic sacrificial material in the at least one organic sacrificial material/dielectric material composition, in order to generate pores in the at least one dielectric material. Also disclosed is a composition useful in making a porous insulator, comprising a heat-activated, pore-forming, sacrificial material; and a dielectric material. Alternatively, the composition useful in making a porous insulator, comprises at least one pore-forming, organic sacrificial material; and at least one dielectric material, wherein the at least one pore-forming, material is a norbornene-type polymer. | |
dc.description.assignee | Georgia Tech Research Corporation | |
dc.identifier.cpc | H01L21/02126 | |
dc.identifier.cpc | H01L21/02203 | |
dc.identifier.cpc | H01L21/02216 | |
dc.identifier.patentapplicationnumber | 09/325977 | |
dc.identifier.patentnumber | 6162838 | |
dc.identifier.uri | http://hdl.handle.net/1853/57367 | |
dc.identifier.uspc | 521/77 | |
dc.title | Porous Insulating Compounds And Method For Making Same | |
dc.type | Text | |
dc.type.genre | Patent | |
dspace.entity.type | Publication | |
local.contributor.corporatename | Georgia Institute of Technology | |
local.relation.ispartofseries | Georgia Tech Patents | |
relation.isOrgUnitOfPublication | cc30e153-7a64-4ae2-9b1d-5436686785e3 | |
relation.isSeriesOfPublication | 0f49c79d-4efb-4bd9-b060-5c7f9191b9da |
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