Title:
Porous Insulating Compounds And Method For Making Same

dc.contributor.patentcreator Kohl, Paul A.
dc.date.accessioned 2017-05-12T14:27:36Z
dc.date.available 2017-05-12T14:27:36Z
dc.date.filed 6/4/1999
dc.date.issued 12/19/2000
dc.description.abstract A method of forming a porous insulating composition comprising the steps of (A) providing at least one organic sacrificial material/dielectric material composition comprising at least one organic sacrificial material and at least one dielectric material; and (B) removing the at least one organic sacrificial material in the at least one organic sacrificial material/dielectric material composition, in order to generate pores in the at least one dielectric material. Also disclosed is a composition useful in making a porous insulator, comprising a heat-activated, pore-forming, sacrificial material; and a dielectric material. Alternatively, the composition useful in making a porous insulator, comprises at least one pore-forming, organic sacrificial material; and at least one dielectric material, wherein the at least one pore-forming, material is a norbornene-type polymer.
dc.description.assignee Georgia Tech Research Corporation
dc.identifier.cpc H01L21/02126
dc.identifier.cpc H01L21/02203
dc.identifier.cpc H01L21/02216
dc.identifier.patentapplicationnumber 09/325977
dc.identifier.patentnumber 6162838
dc.identifier.uri http://hdl.handle.net/1853/57367
dc.identifier.uspc 521/77
dc.title Porous Insulating Compounds And Method For Making Same
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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