Title:
Low Frequency Process-variation-insensitive Temperature-stable Micromechanical Resonators

dc.contributor.patentcreator Ho, Gavin Kar-fai
dc.contributor.patentcreator Ayazi, Farrokh
dc.date.accessioned 2017-05-12T14:28:56Z
dc.date.available 2017-05-12T14:28:56Z
dc.date.filed 12/13/2007
dc.date.issued 12/28/2010
dc.description.abstract Disclosed are micromechanical resonators having features that compensate for process variations and provide improved inherent temperature stability. Exemplary resonators may comprise comb drive resonators or parallel-plate drive resonators. The resonators comprise a (silicon-on-insulator) substrate with resonator apparatus formed therein. The resonator apparatus has one or more anchors connected to the substrate, at least one excitation/sense port that is electrically insulated from the substrate, and a resonator. The resonator comprises one or more flexural members connected to the one or more anchors that are separated from the substrate and separated from the excitation/sense port by gaps. A mass is coupled to flexural members, is separated from the substrate, and comprises a grid. Process compensation is achieved using a resonator mass in the form of a grid of lines that form holes or lines through the mass, wherein widths of lines of the grid are approximately 1/3 the width of the flexural members. Temperature stability is provided using silicon dioxide on at least one of the surfaces of the flexural members.
dc.description.assignee Georgia Tech Research Corporation
dc.identifier.cpc H03H3/0076
dc.identifier.cpc H03H3/0077
dc.identifier.cpc H03H9/02448
dc.identifier.patentapplicationnumber 12/001946
dc.identifier.patentnumber 7859365
dc.identifier.uri http://hdl.handle.net/1853/57917
dc.identifier.uspc 333/186
dc.title Low Frequency Process-variation-insensitive Temperature-stable Micromechanical Resonators
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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