Title:
Low Frequency Process-variation-insensitive Temperature-stable Micromechanical Resonators
Low Frequency Process-variation-insensitive Temperature-stable Micromechanical Resonators
dc.contributor.patentcreator | Ho, Gavin Kar-fai | |
dc.contributor.patentcreator | Ayazi, Farrokh | |
dc.date.accessioned | 2017-05-12T14:28:56Z | |
dc.date.available | 2017-05-12T14:28:56Z | |
dc.date.filed | 12/13/2007 | |
dc.date.issued | 12/28/2010 | |
dc.description.abstract | Disclosed are micromechanical resonators having features that compensate for process variations and provide improved inherent temperature stability. Exemplary resonators may comprise comb drive resonators or parallel-plate drive resonators. The resonators comprise a (silicon-on-insulator) substrate with resonator apparatus formed therein. The resonator apparatus has one or more anchors connected to the substrate, at least one excitation/sense port that is electrically insulated from the substrate, and a resonator. The resonator comprises one or more flexural members connected to the one or more anchors that are separated from the substrate and separated from the excitation/sense port by gaps. A mass is coupled to flexural members, is separated from the substrate, and comprises a grid. Process compensation is achieved using a resonator mass in the form of a grid of lines that form holes or lines through the mass, wherein widths of lines of the grid are approximately 1/3 the width of the flexural members. Temperature stability is provided using silicon dioxide on at least one of the surfaces of the flexural members. | |
dc.description.assignee | Georgia Tech Research Corporation | |
dc.identifier.cpc | H03H3/0076 | |
dc.identifier.cpc | H03H3/0077 | |
dc.identifier.cpc | H03H9/02448 | |
dc.identifier.patentapplicationnumber | 12/001946 | |
dc.identifier.patentnumber | 7859365 | |
dc.identifier.uri | http://hdl.handle.net/1853/57917 | |
dc.identifier.uspc | 333/186 | |
dc.title | Low Frequency Process-variation-insensitive Temperature-stable Micromechanical Resonators | |
dc.type | Text | |
dc.type.genre | Patent | |
dspace.entity.type | Publication | |
local.contributor.corporatename | Georgia Institute of Technology | |
local.relation.ispartofseries | Georgia Tech Patents | |
relation.isOrgUnitOfPublication | cc30e153-7a64-4ae2-9b1d-5436686785e3 | |
relation.isSeriesOfPublication | 0f49c79d-4efb-4bd9-b060-5c7f9191b9da |
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