Title:
Cantilevers With Integrated Actuators For Probe Microscopy

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dc.contributor.patentcreator Degertekin, Fahrettin Levent
dc.date.accessioned 2017-05-12T14:28:51Z
dc.date.available 2017-05-12T14:28:51Z
dc.date.filed 8/14/2007
dc.date.issued 9/14/2010
dc.description.abstract An atomic force microscopy sensor includes a substrate, a cantilever beam and an electrostatic actuator. The cantilever beam has a proximal end and an opposite distal end. The proximal end is in a fixed relationship with the substrate and the cantilever beam is configured so that the distal end is in a moveable relationship with respect to the substrate. The electrostatic actuator includes a first electrode that is coupled to the cantilever beam adjacent to the proximal end and a spaced apart second electrode that is in a fixed relationship with the substrate. When an electrical potential is applied between the first electrode and the second electrode, the first electrode is drawn to the second electrode, thereby causing the distal end of the cantilever beam to move.
dc.description.assignee Georgia Tech Research Corporation
dc.identifier.cpc B82Y35/00
dc.identifier.cpc G01Q10/045
dc.identifier.cpc G01Q20/04
dc.identifier.patentapplicationnumber 11/838547
dc.identifier.patentnumber 7797757
dc.identifier.uri http://hdl.handle.net/1853/57881
dc.identifier.uspc 850/7
dc.title Cantilevers With Integrated Actuators For Probe Microscopy
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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