Title:
Methods Of Forming Micromechanical Resonators Having High Density Trench Arrays Therein That Provide Passive Temperature Compensation

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dc.contributor.patentcreator Ayazi, Farrokh
dc.contributor.patentcreator Tabrizian, Roozbeh
dc.contributor.patentcreator Casinovi, Giorgio
dc.date.accessioned 2017-05-12T14:25:58Z
dc.date.available 2017-05-12T14:25:58Z
dc.date.filed 6/4/2010
dc.date.issued 2/26/2013
dc.description.abstract A method of forming a micromechanical resonator includes forming a resonator body anchored to a substrate by at least a first anchor. This resonator body may include a semiconductor or other first material having a negative temperature coefficient of elasticity (TCE). A two-dimensional array of spaced-apart trenches are provided in the resonator body. These trenches may be filled with an electrically insulating or other second material having a positive TCE. The array of trenches may extend uniformly across the resonator body, including regions in the body that have relatively high and low mechanical stress during resonance. This two-dimensional array (or network) of trenches can be modeled as a network of mass-spring systems with springs in parallel and/or in series with respect to a direction of a traveling acoustic wave within the resonator body during resonance.
dc.description.assignee Georgia Tech Research Corporation
dc.identifier.cpc H03H3/0076
dc.identifier.cpc H03H9/02448
dc.identifier.cpc Y10T29/49155
dc.identifier.patentapplicationnumber 12/794361
dc.identifier.patentnumber 8381378
dc.identifier.uri http://hdl.handle.net/1853/56746
dc.identifier.uspc 29/25.35
dc.title Methods Of Forming Micromechanical Resonators Having High Density Trench Arrays Therein That Provide Passive Temperature Compensation
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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