Title:
In-situ Flux Measurement Devices, Methods, And Systems

dc.contributor.patentcreator Doolittle, Alan W.
dc.contributor.patentcreator Carver, Alexander G.
dc.date.accessioned 2017-05-12T14:25:55Z
dc.date.available 2017-05-12T14:25:55Z
dc.date.filed 8/15/2012
dc.date.issued 1/29/2013
dc.description.abstract In-situ flux measurement methods, devices, and systems are provided. According to some embodiments, an in-situ molecular flux device generally comprises a electrically conductive container configured to hold a precursor material, a heat source proximate the electrically conductive container to heat the precursor material to release ions such that an ion current is produced; and a current-measuring device in electrical communication with the electrically conductive container to measure the ion current associated with the heated precursor material. Other embodiments are also claimed and described.
dc.description.assignee Georgia Tech Research Corporation
dc.identifier.cpc C23C14/544
dc.identifier.cpc C30B23/005
dc.identifier.patentapplicationnumber 13/586368
dc.identifier.patentnumber 8360002
dc.identifier.uri http://hdl.handle.net/1853/56732
dc.identifier.uspc 118/712
dc.title In-situ Flux Measurement Devices, Methods, And Systems
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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