Title:
In-situ Flux Measurement Devices, Methods, And Systems
In-situ Flux Measurement Devices, Methods, And Systems
dc.contributor.patentcreator | Doolittle, Alan W. | |
dc.contributor.patentcreator | Carver, Alexander G. | |
dc.date.accessioned | 2017-05-12T14:25:55Z | |
dc.date.available | 2017-05-12T14:25:55Z | |
dc.date.filed | 8/15/2012 | |
dc.date.issued | 1/29/2013 | |
dc.description.abstract | In-situ flux measurement methods, devices, and systems are provided. According to some embodiments, an in-situ molecular flux device generally comprises a electrically conductive container configured to hold a precursor material, a heat source proximate the electrically conductive container to heat the precursor material to release ions such that an ion current is produced; and a current-measuring device in electrical communication with the electrically conductive container to measure the ion current associated with the heated precursor material. Other embodiments are also claimed and described. | |
dc.description.assignee | Georgia Tech Research Corporation | |
dc.identifier.cpc | C23C14/544 | |
dc.identifier.cpc | C30B23/005 | |
dc.identifier.patentapplicationnumber | 13/586368 | |
dc.identifier.patentnumber | 8360002 | |
dc.identifier.uri | http://hdl.handle.net/1853/56732 | |
dc.identifier.uspc | 118/712 | |
dc.title | In-situ Flux Measurement Devices, Methods, And Systems | |
dc.type | Text | |
dc.type.genre | Patent | |
dspace.entity.type | Publication | |
local.contributor.corporatename | Georgia Institute of Technology | |
local.relation.ispartofseries | Georgia Tech Patents | |
relation.isOrgUnitOfPublication | cc30e153-7a64-4ae2-9b1d-5436686785e3 | |
relation.isSeriesOfPublication | 0f49c79d-4efb-4bd9-b060-5c7f9191b9da |
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