Title:
Fundamental understanding, characterization, passivation and gettering of electrically active defects in silicon
Fundamental understanding, characterization, passivation and gettering of electrically active defects in silicon
Author(s)
Doolittle, William Alan
Advisor(s)
Rohatgi, Ajeet
Editor(s)
Collections
Supplementary to
Permanent Link
Abstract
Sponsor
Date Issued
1996-05
Extent
Resource Type
Text
Resource Subtype
Dissertation
Rights Statement
Access restricted to authorized Georgia Tech users only.