Plasma assisted deposition of low dielectric constant fluorocarbon materials for microelectronic applications

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agraharam_sairam_200008_phd_589820.pdf (21.12 MB)
Author(s)
Agraharam, Sairam
Advisor(s)
Allen, Sue Ann Bidstrup
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Associated Organization(s)
Organizational Unit
School of Chemical and Biomolecular Engineering
School established in 1901 as the School of Chemical Engineering; in 2003, renamed School of Chemical and Biomolecular Engineering
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Supplementary to:
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http://hdl.handle.net/1853/11896
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Date
2000-08
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241 bytes
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Text
Resource Subtype
Dissertation
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