Title:
Plasma assisted deposition of low dielectric constant fluorocarbon materials for microelectronic applications

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agraharam_sairam_200008_phd_589820.pdf (21.12 MB)
Author(s)
Agraharam, Sairam
Authors
Advisor(s)
Hess, Dennis W.
 Kohl, Paul A.
 Allen, Sue Ann Bidstrup
Advisor(s)
Editor(s)
Associated Organization(s)
Organizational Unit
School of Chemical and Biomolecular Engineering
School established in 1901 as the School of Chemical Engineering; in 2003, renamed School of Chemical and Biomolecular Engineering
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Theses and Dissertations
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Permanent Link
http://hdl.handle.net/1853/11896
Abstract
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Date Issued
2000-08
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241 bytes
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Text
Resource Subtype
Dissertation
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