Title:
A study of the effect of ionization efficiency during deposition on the properties of chromium PVD films
A study of the effect of ionization efficiency during deposition on the properties of chromium PVD films
Author(s)
Yu, Chen-Hua Douglas
Advisor(s)
Hochman, Robert F.
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Date Issued
1987-12
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Resource Type
Text
Resource Subtype
Dissertation
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