Micro-Hemispherical Resonators and Methods of Making the Same
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Abstract
Aspects of the present disclosure relate to microelectromechanical systems (MEMS) and methods for fabricating MEMS. In some embodiments, the system includes a resonator and a support stem. In some embodiments, the resonator is a hemisphere. The system can further include a front-side or back-side DC contact. The system can further include a levitation support, by which the resonator is virtually levitated from a substrate. In some embodiments, the resonator can be suitable for use in a microhemispherical resonator gyroscope Aspects of the present disclosure also relate to methods for fabricating axisymmetric resonators, including resonators for use in microhemispherical resonator gyroscopes.
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8/27/2019