Curve Evolution Models for Real-Time Identification with Application to Plasma Etching

Files
1999_IEEE_TAC_001.pdf (179.91 KB)
Author(s)
Berg, Jordan M.
Tannenbaum, Allen R.
Advisor(s)
Editor(s)
Associated Organization(s)
Organizational Unit
Organizational Unit
Organizational Unit
Wallace H. Coulter Department of Biomedical Engineering
The joint Georgia Tech and Emory department was established in 1997
Series
Collections
Research Publications
Supplementary to:
Permanent Link
http://hdl.handle.net/1853/32155
Abstract
It is desirable, in constructing an algorithm for real-time control or identification of free surfaces, to avoid representations of the surface requiring mesh refinement at corners or special logic for topological transitions. Level set methods provide a promising framework for such algorithms. In this paper we present: 1) a mathematical representation of free surface motion that is particularly well-suited to real-time implementation; 2) a technique for estimating an isotropic and homogeneous normal velocity based on a simple measurement; and 3) an application to a semiconductor etching problem.
Sponsor
Date
1999-01
Extent
Resource Type
Text
Resource Subtype
Article
Rights Statement
Rights URI