Bulk Acoustic Wave Accelerometers
Author(s)
Advisor(s)
Editor(s)
Collections
Supplementary to:
Permanent Link
Abstract
Accelerometers and associated techniques for detecting motion are described. For a resonant accelerometer, an externally-applied acceleration can cause a change in the electrical spring constant Ke of the electromechanical system. A resonant accelerometer can be driven to resonate in a bulk acoustic wave mode of vibration, which can have a high resonant frequency. Other accelerometers and associated techniques are disclosed.
Sponsor
Date
7/31/2018