Development and characterization of advanced electron beam resists

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agrawal_ankur_200305_phd_670132.pdf (13.87 MB)
Author(s)
Agrawal, Ankur
Advisor(s)
Henderson, Clifford L.
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School of Chemical and Biomolecular Engineering
School established in 1901 as the School of Chemical Engineering; in 2003, renamed School of Chemical and Biomolecular Engineering
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Theses and Dissertations
Supplementary to:
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http://hdl.handle.net/1853/34054
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Date
2003-05
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Dissertation
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