Title:
Chemical Vapor Deposition Of Group IB Metals
Chemical Vapor Deposition Of Group IB Metals
| dc.contributor.patentcreator | Erbil, Ahmet | |
| dc.date.accessioned | 2017-05-12T14:29:03Z | |
| dc.date.available | 2017-05-12T14:29:03Z | |
| dc.date.filed | 6/22/1988 | |
| dc.date.issued | 11/14/1989 | |
| dc.description.abstract | Coatings of Group IB metals are formed by chemical vapor deposition, in which a heat decomposable organometallic compound of the formula (I) where M is a Group IB metal such as copper, and R is a lower alkyl radical containing from 1 to about 6 carbon atoms, is contacted under nonoxidizing conditions with a heated substrate which is above the decomposition temperature of the organometallic compound. The pure metal is obtained when the compound of the formula I is the sole heat decomposable compound present and deposition is carried out under nonoxidizing conditions. Intermetallic compounds such as copper indium diselenide can be deposited from a copper oxide compound of formula I and a heat decomposable selenium and indium compounds under nonoxidizing conditions. Group II metal oxides and salts, such as barium titanate, are obtainable by deposition from a compound of formula I (and an additional organometallic compound when required) under oxidizing conditions. | |
| dc.description.assignee | Georgia Tech Research Corporation | |
| dc.identifier.cpc | C04B41/009 | |
| dc.identifier.cpc | C04B41/4554 | |
| dc.identifier.cpc | C04B41/81 | |
| dc.identifier.patentapplicationnumber | 07/210022 | |
| dc.identifier.patentnumber | 4880670 | |
| dc.identifier.uri | http://hdl.handle.net/1853/57964 | |
| dc.identifier.uspc | 427/226 | |
| dc.title | Chemical Vapor Deposition Of Group IB Metals | |
| dc.type | Text | |
| dc.type.genre | Patent | |
| dspace.entity.type | Publication | |
| local.contributor.corporatename | Georgia Institute of Technology | |
| local.relation.ispartofseries | Georgia Tech Patents | |
| relation.isOrgUnitOfPublication | cc30e153-7a64-4ae2-9b1d-5436686785e3 | |
| relation.isSeriesOfPublication | 0f49c79d-4efb-4bd9-b060-5c7f9191b9da |
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