Title:
Anisotropic low-energy electron-enhanced etching of semiconductors in DC plasma
Anisotropic low-energy electron-enhanced etching of semiconductors in DC plasma
Author(s)
Steiner, Pinckney Alston, IV
Advisor(s)
Gillis, Harry P.
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Abstract
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Date Issued
1993-08
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Text
Resource Subtype
Thesis
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