Physical modeling of low-k dielectric breakdown and the estimation

Milor, Linda S.

Title:

Physical modeling of low-k dielectric breakdown and the estimation

dc.contributor.author	Milor, Linda S.
dc.contributor.corporatename	Georgia Institute of Technology. Office of Sponsored Programs	en_US
dc.contributor.corporatename	Georgia Institute of Technology. School of Electrical and Computer Engineering	en_US
dc.date.accessioned	2019-06-21T17:18:08Z
dc.date.available	2019-06-21T17:18:08Z
dc.date.issued	2013-08
dc.description	Issued as final report	en_US
dc.description.sponsorship	National Science Foundation (U.S.)	en_US
dc.identifier.uri	http://hdl.handle.net/1853/61452
dc.language.iso	en_US	en_US
dc.publisher	Georgia Institute of Technology	en_US
dc.relation.ispartofseries	School of Electrical and Computer Engineering ; Project no. 110022	en_US
dc.subject	Dielectric breakdown	en_US
dc.title	Physical modeling of low-k dielectric breakdown and the estimation	en_US
dc.title.alternative	ARRA: Physical modeling of low-k dielectric breakdown and the estimation	en_US
dc.type	Text
dc.type.genre	Technical Report
dspace.entity.type	Publication
local.contributor.author	Milor, Linda S.
local.contributor.corporatename	School of Electrical and Computer Engineering
local.contributor.corporatename	College of Engineering
local.contributor.corporatename	Office of Sponsored Programs
local.relation.ispartofseries	OSP Final Research Reports
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