Systematic design and fabrication of high-Q single-mode pulley-coupled planar silicon nitride microdisk resonators at visible wavelengths

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Hosseini, Ehsan Shah
Yegnanarayanan, Siva
Atabaki, Amir Hossein
Soltani, Mohammad
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http://hdl.handle.net/1853/45552
Abstract
High quality (Q ≈ 6 × 10⁵) microdisk resonators are demonstrated in a Si₃N₄ on SiO₂platform at 652–660 nm with integrated in-plane wrap-around coupling waveguides to enable critical coupling to specific microdisk radial modes. Selective coupling to the first three radial modes with >20dB suppression of the other radial modes is achieved by controlling the wrap-around waveguide width. Advantages of such pulley-coupled microdisk resonators include single mode operation, ease of fabrication due to larger waveguide-resonator gaps, the possibility of resist reflow during the lithography phase to improve microdisk etched surface quality, and the ability to realize highly over-coupled microdisks suitable for low-loss delay lines and add-drop filters.
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2010-02
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