Photoresist removal using low molecular weight alcohols and IPA-based solutions

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gao_karen_g_200105_ms_607330.pdf (2.52 MB)
Author(s)
Gao, Karen Ging
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Organizational Unit
School of Chemical and Biomolecular Engineering
School established in 1901 as the School of Chemical Engineering; in 2003, renamed School of Chemical and Biomolecular Engineering
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Theses and Dissertations
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http://hdl.handle.net/1853/11875
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Date
2001-05
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235 bytes
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Text
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Thesis
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