Title:
Photoresist removal using low molecular weight alcohols and IPA-based solutions

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gao_karen_g_200105_ms_607330.pdf (2.52 MB)
Author(s)
Gao, Karen Ging
Authors
Advisor(s)
Hess, Dennis W.
Advisor(s)
Editor(s)
Associated Organization(s)
Organizational Unit
School of Chemical and Biomolecular Engineering
School established in 1901 as the School of Chemical Engineering; in 2003, renamed School of Chemical and Biomolecular Engineering
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Theses and Dissertations
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Permanent Link
http://hdl.handle.net/1853/11875
Abstract
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Date Issued
2001-05
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235 bytes
Resource Type
Text
Resource Subtype
Thesis
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