Inspection Systems And Methods
Author(s)
Advisor(s)
Editor(s)
Collections
Supplementary to:
Permanent Link
Abstract
Embodiments of inspection systems and methods are disclosed. One embodiment of an inspection system, among others, comprises logic configured to receive a reference signal and a target signal, the reference signal having first surface displacement information and the target signal having second surface displacement information, said logic configured to determine a correlation coefficient between the first surface displacement information and the second surface displacement information, the correlation coefficient indicating whether an inspected object exhibits a defect.
Sponsor
Date
2/17/2009
Extent
Resource Type
Text
Resource Subtype
Patent