Low dielectric constant porous spin-on glass for microelectronic applications

Files
blanco_agnes_m_200205_phd_629156.pdf (20.68 MB)
Author(s)
Blanco, Agnes M. Padovani
Advisor(s)
Editor(s)
Associated Organization(s)
Organizational Unit
School of Chemical and Biomolecular Engineering
School established in 1901 as the School of Chemical Engineering; in 2003, renamed School of Chemical and Biomolecular Engineering
Organizational Unit
Series
Series
Collections
Theses and Dissertations
Supplementary to:
Permanent Link
http://hdl.handle.net/1853/11840
Abstract
Sponsor
Date
2002-05
Extent
239 bytes
Resource Type
Text
Resource Subtype
Dissertation
Rights Statement
Access restricted to authorized Georgia Tech users only.
Rights URI