Resonating Star Gyroscope
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Abstract
Disclosed are resonant vibratory gyroscopes and fabrication methods relating thereto. The angular motion sensor comprises a resonating star gyroscope which comprises a vibratory solid or shell-type structure for rate sensing or measuring angle of rotation. The structure formed as a merged superposition of two square entities, yields in-plane degenerate flexural modes that are used to sense rotation around the axis perpendicular to the substrate. The resonating star gyroscope may be implemented using the primary flexural degenerate modes. Such an implementation has been successfully demonstrated by the authors using trench-refilled polysilicon and epitaxial polysilicon as the structural material. It is also possible to use a solid star-shaped resonator (with or without perforations) for the gyroscope. The authors also suggest the operation of the resonating star gyroscope employing the higher-order flexural modes. In this particular implementation the authors utilized a (100) single crystalline structural material.
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4/22/2008
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Patent