Title:
Advanced single-chip temperature stabilization system for silicon MEMS resonators and gyroscopes
Advanced single-chip temperature stabilization system for silicon MEMS resonators and gyroscopes
| dc.contributor.advisor | Ayazi, Farrokh | |
| dc.contributor.author | Liu, Chang-Shun | |
| dc.contributor.committeeMember | Raychowdhury, Arijit | |
| dc.contributor.committeeMember | Wang, Hua | |
| dc.contributor.committeeMember | Cressler, John D. | |
| dc.contributor.committeeMember | Hesketh, Peter J. | |
| dc.contributor.department | Electrical and Computer Engineering | |
| dc.date.accessioned | 2020-05-20T16:57:38Z | |
| dc.date.available | 2020-05-20T16:57:38Z | |
| dc.date.created | 2019-05 | |
| dc.date.issued | 2019-04-01 | |
| dc.date.submitted | May 2019 | |
| dc.date.updated | 2020-05-20T16:57:38Z | |
| dc.description.abstract | The main objective of this research is to develop temperature and frequency stabilization techniques for silicon MEMS oven-controlled crystal oscillators (MEMS OCXO) with high-frequency stability. The device was built upon an ovenized platform that used a micro-heater to adjust the temperature of the resonator. Structural resistance-based (Rstruc) temperature sensing was used to improve the self-temperature monitoring accuracy of the silicon MEMS resonator. An analog feedback micro-oven control loop and a feedforward digital calibration scheme were developed for a 77MHz MEMS oscillator, which achieved a ±0.3ppm frequency stability from -25°C to 85°C. An AC heating scheme was also developed to enable tighter integration of the resonator, temperature sensor (Rstruc) and heaters. This temperature stabilization technique was also applied to silicon MEMS mode-matched vibratory x/y-axis and z-axis gyroscopes on a single chip. The temperature-induced frequency change, scale factor and output bias variations were all reduced significantly. The complete interface circuit for the single-chip three axes gyroscopes were also developed with an innovative trans-impedance amplifier to reduce the input-referred noise. For the first time, the simultaneous operation of mode-matched vibratory 3-axis MEMS gyroscopes on a single chip was demonstrated. | |
| dc.description.degree | Ph.D. | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.uri | http://hdl.handle.net/1853/62688 | |
| dc.language.iso | en_US | |
| dc.publisher | Georgia Institute of Technology | |
| dc.subject | MEMS | |
| dc.subject | Temperature stabilization | |
| dc.subject | Ovenization | |
| dc.subject | Gyroscopes | |
| dc.title | Advanced single-chip temperature stabilization system for silicon MEMS resonators and gyroscopes | |
| dc.type | Text | |
| dc.type.genre | Dissertation | |
| dspace.entity.type | Publication | |
| local.contributor.advisor | Ayazi, Farrokh | |
| local.contributor.corporatename | School of Electrical and Computer Engineering | |
| local.contributor.corporatename | College of Engineering | |
| relation.isAdvisorOfPublication | 298d0abc-b13a-4bb8-a8c5-ba73301c2436 | |
| relation.isOrgUnitOfPublication | 5b7adef2-447c-4270-b9fc-846bd76f80f2 | |
| relation.isOrgUnitOfPublication | 7c022d60-21d5-497c-b552-95e489a06569 | |
| thesis.degree.level | Doctoral |