Title:
Modeling and optimization of plasma-enhanced chemical vapor deposition using neural networks and genetic algorithms
Modeling and optimization of plasma-enhanced chemical vapor deposition using neural networks and genetic algorithms
Author(s)
Han, Seung Soo
Advisor(s)
May, Gary S.
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Abstract
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Date Issued
1996-12
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Resource Type
Text
Resource Subtype
Dissertation
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Access restricted to authorized Georgia Tech users only.