Title:
Metal organic frameworks based microcantilever gas sensors for detection of volatile organic compounds

dc.contributor.advisor Hesketh, Peter J.
dc.contributor.author Ellern, Ilya
dc.contributor.committeeMember Sulchek, Todd
dc.contributor.committeeMember Bassiri-Gharb, Nazanin
dc.contributor.department Mechanical Engineering
dc.date.accessioned 2013-09-20T15:21:16Z
dc.date.available 2013-09-20T15:21:16Z
dc.date.created 2013-08
dc.date.issued 2013-07-03
dc.date.submitted August 2013
dc.date.updated 2013-09-20T15:21:16Z
dc.description.abstract Metal Organic Frameworks (MOFs) are a new class of nanoporous materials with high surface area, thermal/chemical stability and a taylorable pore size. These properties make MOFs ideal for storage and gas separation applications. Piezoresistive microcantilever sensors are microfabricated devices that are highly sensitive to surface strain due to doped single crystal silicon regions. Changes in resistance generated by surface strain can be measured with a high degree of accuracy using a Wheatstone bridge and basic instrumentation. This thesis will discuss the use of piezoresistive microcantilever sensors as a transduction mechanism for detection of volatile organic compounds (VOC's) using MOF coatings. It will be shown that by coating a microcantilever with MOFs it is possible to detect low levels of different VOC's (hundreds of parts per million). Excellent sensitivity and a simple transduction mechanism make these devices low power and highly compact. Such devices would be capable of detecting a plethora of different analytes at low concentrations. Devices were engineered for maximum response and microfabricated in the cleanroom with high yield. A custom setup for testing the devices was designed and machined. A number of MOFs were selected and tested, their response was recorded and analyzed. Twelve different analytes including eleven VOC's and water were used to characterize the MOFs. Microcantilever sensors were shown to be durable, reliable and stable in long term testing despite being subjected to many different analytes. MOF coatings proved flexible, durable, stable and reversible. This work will show a promising new technology for a next generation gas sensor.
dc.description.degree M.S.
dc.format.mimetype application/pdf
dc.identifier.uri http://hdl.handle.net/1853/49127
dc.language.iso en_US
dc.publisher Georgia Institute of Technology
dc.subject Piezoresistive
dc.subject Microcantilever
dc.subject Gas sensors
dc.subject Metal organic frameworks
dc.subject.lcsh Gas detectors
dc.subject.lcsh Detectors
dc.subject.lcsh Microelectromechanical systems
dc.title Metal organic frameworks based microcantilever gas sensors for detection of volatile organic compounds
dc.type Text
dc.type.genre Thesis
dspace.entity.type Publication
local.contributor.advisor Hesketh, Peter J.
local.contributor.corporatename George W. Woodruff School of Mechanical Engineering
local.contributor.corporatename College of Engineering
relation.isAdvisorOfPublication 0d9e4b1a-9eee-46d7-9a35-9418225d923b
relation.isOrgUnitOfPublication c01ff908-c25f-439b-bf10-a074ed886bb7
relation.isOrgUnitOfPublication 7c022d60-21d5-497c-b552-95e489a06569
thesis.degree.level Masters
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