Development of an integrated organic film removal and surface conditioning process using low molecular weight alcohols for advanced Integrated Circuit (IC) fabrication

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kamal_tazrien_200012_phd_590702.pdf (19.1 MB)
Author(s)
Kamal, Tazrien
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School of Chemical and Biomolecular Engineering
School established in 1901 as the School of Chemical Engineering; in 2003, renamed School of Chemical and Biomolecular Engineering
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http://hdl.handle.net/1853/11255
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Date
2000-12
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238 bytes
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Text
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Dissertation
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