Title:
Porous Gas Sensors And Method Of Preparation Thereof
Porous Gas Sensors And Method Of Preparation Thereof
| dc.contributor.patentcreator | Gole, James L. | |
| dc.contributor.patentcreator | Seals, Lenward T. | |
| dc.contributor.patentcreator | Hesketh, Peter J. | |
| dc.date.accessioned | 2017-05-12T14:28:54Z | |
| dc.date.available | 2017-05-12T14:28:54Z | |
| dc.date.filed | 1/24/2005 | |
| dc.date.issued | 11/23/2010 | |
| dc.description.abstract | A sensor is disclosed. A representative sensor includes a silicon substrate having a porous silicon region. A portion of the porous silicon region has a front contact is disposed thereon. The contact resistance between the porous silicon region and the front contact is between about 10 ohms and 100 ohms. | |
| dc.description.assignee | Georgia Tech Research Corporation | |
| dc.identifier.cpc | G01N27/127 | |
| dc.identifier.patentapplicationnumber | 11/041358 | |
| dc.identifier.patentnumber | 7838949 | |
| dc.identifier.uri | http://hdl.handle.net/1853/57903 | |
| dc.identifier.uspc | 257/414 | |
| dc.title | Porous Gas Sensors And Method Of Preparation Thereof | |
| dc.type | Text | |
| dc.type.genre | Patent | |
| dspace.entity.type | Publication | |
| local.contributor.corporatename | Georgia Institute of Technology | |
| local.relation.ispartofseries | Georgia Tech Patents | |
| relation.isOrgUnitOfPublication | cc30e153-7a64-4ae2-9b1d-5436686785e3 | |
| relation.isSeriesOfPublication | 0f49c79d-4efb-4bd9-b060-5c7f9191b9da |
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