Title:
Porous Gas Sensors And Method Of Preparation Thereof
Porous Gas Sensors And Method Of Preparation Thereof
Files
Author(s)
Advisor(s)
Editor(s)
Collections
Supplementary to
Permanent Link
Abstract
A sensor is disclosed. A representative sensor includes a silicon substrate having a porous silicon region. A portion of the porous silicon region has a front contact is disposed thereon. The contact resistance between the porous silicon region and the front contact is between about 10 ohms and 100 ohms.
Sponsor
Date Issued
11/23/2010
Extent
Resource Type
Text
Resource Subtype
Patent