Title:
Micro-electromechanical Voltage Tunable Capacitor And And Filter Devices

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dc.contributor.patentcreator Ayazi, Farrokh
dc.contributor.patentcreator Raieszadeh, Mina
dc.date.accessioned 2017-05-12T14:29:00Z
dc.date.available 2017-05-12T14:29:00Z
dc.date.filed 12/4/2007
dc.date.issued 4/26/2011
dc.description.abstract Disclosed are one-port and two-port voltage-tunable micro-electromechanical capacitors, switches, and filter devices. High aspect-ratio metal micromachining is used to implement very high quality factor (Q) tunable and fixed capacitors, fixed inductors, and low insertion loss tunable and fixed bandpass LC filters. The tunable capacitors can move in the plane of the substrate by the application of DC voltages and achieve greater than 100% of tuning. A combination of low-loss substrate and highest conductivity metal is used to achieve record high Q and low insertion loss at radio frequencies. The disclosed tunable capacitor structure can also be used as a micromechanical switch.
dc.description.assignee Georgia Tech Research Corporation
dc.identifier.cpc H01G5/145
dc.identifier.cpc H01H59/0009
dc.identifier.cpc H03H7/0115
dc.identifier.patentapplicationnumber 11/999114
dc.identifier.patentnumber 7933112
dc.identifier.uri http://hdl.handle.net/1853/57944
dc.identifier.uspc 361/287
dc.title Micro-electromechanical Voltage Tunable Capacitor And And Filter Devices
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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