Title:
Improved understanding and control of the properties of PECVD silicon nitride and its applications in multicrystalline silicon solar cells
Improved understanding and control of the properties of PECVD silicon nitride and its applications in multicrystalline silicon solar cells
Author(s)
Cai, Li
Advisor(s)
Rohatgi, Ajeet
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Date Issued
1997-05
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Resource Type
Text
Resource Subtype
Dissertation
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Access restricted to authorized Georgia Tech users only.