Title:
Optimizing inspection of high aspect ratio microstructure using a programmable optical microscope
Optimizing inspection of high aspect ratio microstructure using a programmable optical microscope
| dc.contributor.advisor | Kurfess, Thomas R. | |
| dc.contributor.author | Ceremuga, Joseph Thomas, II | en_US |
| dc.contributor.department | Mechanical Engineering | en_US |
| dc.date.accessioned | 2005-03-10T18:40:17Z | |
| dc.date.available | 2005-03-10T18:40:17Z | |
| dc.date.issued | 2003-12-01 | en_US |
| dc.description.degree | M.S. | en_US |
| dc.format.extent | 6403375 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.uri | http://hdl.handle.net/1853/5394 | |
| dc.language.iso | en_US | |
| dc.publisher | Georgia Institute of Technology | en_US |
| dc.subject | Optical data processing | en_US |
| dc.subject | Metrology | |
| dc.subject | Microsocopy | |
| dc.subject | Lithography | |
| dc.title | Optimizing inspection of high aspect ratio microstructure using a programmable optical microscope | en_US |
| dc.type | Text | |
| dc.type.genre | Thesis | |
| dspace.entity.type | Publication | |
| local.contributor.advisor | Kurfess, Thomas R. | |
| local.contributor.corporatename | George W. Woodruff School of Mechanical Engineering | |
| local.contributor.corporatename | College of Engineering | |
| relation.isAdvisorOfPublication | 1fae7587-6ed2-4214-b785-8741ad9f465a | |
| relation.isOrgUnitOfPublication | c01ff908-c25f-439b-bf10-a074ed886bb7 | |
| relation.isOrgUnitOfPublication | 7c022d60-21d5-497c-b552-95e489a06569 |
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