Title:
Analysis of the effects of wafer slicing on the mechanical integrity of silicon wafers
Analysis of the effects of wafer slicing on the mechanical integrity of silicon wafers
| dc.contributor.author | Melkote, Shreyes N. | en_US |
| dc.contributor.author | Danyluk, Steven | en_US |
| dc.contributor.author | Wu, Hao | en_US |
| dc.contributor.corporatename | Georgia Institute of Technology. Office of Sponsored Programs | en_US |
| dc.contributor.corporatename | Georgia Institute of Technology. Manufacturing Research Center | en_US |
| dc.contributor.corporatename | Georgia Institute of Technology. School of Mechanical Engineering | en_US |
| dc.contributor.corporatename | Georgia Institute of Technology. Office of Sponsored Programs | |
| dc.date.accessioned | 2013-06-20T14:16:56Z | |
| dc.date.available | 2013-06-20T14:16:56Z | |
| dc.date.issued | 2011-12-31 | en_US |
| dc.description | Issued as final report | en_US |
| dc.description.sponsorship | North Carolina State University | en_US |
| dc.identifier.other | 10962 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1853/47883 | |
| dc.publisher | Georgia Institute of Technology | en_US |
| dc.relation.ispartofseries | Manufacturing Research Center ; Project no. 116481 | en_US |
| dc.title | Analysis of the effects of wafer slicing on the mechanical integrity of silicon wafers | en_US |
| dc.type | Text | |
| dc.type.genre | Technical Report | |
| dspace.entity.type | Publication | |
| local.contributor.author | Danyluk, Steven | |
| local.contributor.author | Melkote, Shreyes N. | |
| local.contributor.corporatename | George W. Woodruff School of Mechanical Engineering | |
| local.contributor.corporatename | Office of Sponsored Programs | |
| local.contributor.corporatename | College of Engineering | |
| local.contributor.corporatename | Georgia Tech Manufacturing Institute | |
| local.relation.ispartofseries | OSP Final Research Reports | |
| relation.isAuthorOfPublication | 87cdff3a-1d95-4b3b-97f3-fa686905084b | |
| relation.isAuthorOfPublication | e78c9d4f-2d4a-4337-9739-f9179a9fd7fb | |
| relation.isOrgUnitOfPublication | c01ff908-c25f-439b-bf10-a074ed886bb7 | |
| relation.isOrgUnitOfPublication | c315e181-6c1e-4968-b8cf-a66220b5bcf2 | |
| relation.isOrgUnitOfPublication | 7c022d60-21d5-497c-b552-95e489a06569 | |
| relation.isOrgUnitOfPublication | 8d86298c-7bde-4eb8-b645-95e429e92da3 | |
| relation.isSeriesOfPublication | 628bc9a1-6779-42aa-aa38-1dcd6fcd12ca |
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