Title:
Functionalization of high frequency SAW RFID devices for ozone dosimetry
Functionalization of high frequency SAW RFID devices for ozone dosimetry
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Westafer, Ryan S.
Levitin, Galit
Hess, Dennis W.
Bergin, Michael H.
Edmonsonx, Peter J.
Hunt, William D.
Levitin, Galit
Hess, Dennis W.
Bergin, Michael H.
Edmonsonx, Peter J.
Hunt, William D.
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Abstract
In this paper we report new work on the gravimetric
detection of ozone at EPA and OSHA relevant concentrations
(approximately 100 ppb) in filtered ambient air. We have
extended our proof-of-concept work which used both quartz
crystal microbalance (QCM) and surface acoustic wave (SAW)
resonators. We now enable detection using our high frequency
SAW RFID devices. Such surface wave devices are extremely
sensitive to the viscosity, thickness, and uniformity of the reactive
or sorbent coating. We report laboratory characterization of our
polymer-coated SAW sensors operating between 200 and 600
MHz on lithium niobate substrates. Return loss measurements
confirm adequate load bearing even at 550 MHz. We compare
both the temperature and ozone sensitivity of the RFID devices
to conventional resonators. In conclusion, we suggest the design
improvements to yield a next generation of SAW RFID ozone
sensors with even greater sensitivity.
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Date Issued
2009
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Proceedings