Title:
Fabrication Of Semiconductor Devices With Air Gaps For Ultra Low Capacitance Interconnections And Methods Of Making Same

dc.contributor.patentcreator Kohl, Paul Albert
dc.contributor.patentcreator Allen, Sue Ann Bidstrup
dc.contributor.patentcreator Henderson, Clifford Lee
dc.contributor.patentcreator Reed, Hollie Ann
dc.contributor.patentcreator Bhusari, Dhananjay M.
dc.date.accessioned 2017-05-12T14:28:04Z
dc.date.available 2017-05-12T14:28:04Z
dc.date.filed 8/25/2003
dc.date.issued 5/3/2005
dc.description.abstract A method of forming an air gap or gaps within solid structures and specifically semiconductor structures to reduce capacitive coupling between electrical elements such as metal lines, wherein a sacrificial material is used to occupy a closed interior volume in a semiconductor structure is disclosed. The sacrificial material is caused to decompose into one or more gaseous decomposition products which are removed, in one embodiment by diffusion, through an overcoat layer. The decomposition of the sacrificial material leaves an air gap or gaps at the closed interior volume previously occupied by the sacrificial material. The air gaps may be disposed between electrical leads to minimize capacitive coupling therebetween. Also disclosed are methods of forming multi-level air gaps and methods or forming over-coated conductive lines or leads wherein a portion of the overcoating is in contact with at least one air gap.
dc.description.assignee Georgia Tech Research Corporation
dc.identifier.cpc H01L21/7682
dc.identifier.patentapplicationnumber 10/647813
dc.identifier.patentnumber 6888249
dc.identifier.uri http://hdl.handle.net/1853/57570
dc.identifier.uspc 257/758
dc.title Fabrication Of Semiconductor Devices With Air Gaps For Ultra Low Capacitance Interconnections And Methods Of Making Same
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
Files
Original bundle
Now showing 1 - 1 of 1
Thumbnail Image
Name:
6888249.pdf
Size:
1.4 MB
Format:
Adobe Portable Document Format
Description: