Title:
Optical interferometric measurement of in-plane residual stresses in SiO₂ films on silicon substrates
Optical interferometric measurement of in-plane residual stresses in SiO₂ films on silicon substrates
Author(s)
Ghaffari, Kasra
Advisor(s)
Danyluk, Steven
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Date Issued
1995-08
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Resource Type
Text
Resource Subtype
Dissertation
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Access restricted to authorized Georgia Tech users only.