Title:
Surface Micromachined Millimeter-scale RF System And Method

dc.contributor.patentcreator Allen, Mark G.
dc.contributor.patentcreator Yoon, Yong-kyu
dc.contributor.patentcreator Park, Jin-woo
dc.contributor.patentcreator Joung, Yeun-ho
dc.contributor.patentcreator Cros, Florent
dc.contributor.patentcreator Papapolymerou, Ioannis
dc.contributor.patentcreator Tentzeris, Emmanouil
dc.contributor.patentcreator Pan, Bo
dc.date.accessioned 2017-05-12T14:28:20Z
dc.date.available 2017-05-12T14:28:20Z
dc.date.filed 6/6/2005
dc.date.issued 3/27/2007
dc.description.abstract A surface micromachined electromagnetically radiating antenna includes a coplanar waveguide on a ground plane coated substrate having a conductor path. The conductor path is coupled to a monopole conductor, which has a generally-cylindrical backbone erected vertically from the substrate and a metal layer deposited on the backbone at a predetermined thickness. The antenna may be fabricated by depositing an epoxy on the ground plane coated substrate to a predetermined depth and according to a pattern. The epoxy is exposed to an ultraviolet source that develops one or more columns according to the pattern. A seed layer of metal may be formed on the developed column. A conductive metal is electrodeposited over the column surface to produce the monopole antenna. Other antenna may be created by adding monopoles and/or conductive metal patches and/or strips that are positioned atop the monopoles and elevated from the substrate.
dc.description.assignee Georgia Tech Research Corporation
dc.identifier.cpc H01Q9/0407
dc.identifier.cpc H01Q19/32
dc.identifier.cpc H01Q9/30
dc.identifier.patentapplicationnumber 11/145911
dc.identifier.patentnumber 7196666
dc.identifier.uri http://hdl.handle.net/1853/57678
dc.identifier.uspc 343/700MS
dc.title Surface Micromachined Millimeter-scale RF System And Method
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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