Title:
Interface circuits for readout and control of a micro-hemispherical resonating gyroscope

dc.contributor.advisor Ayazi, Farrokh
dc.contributor.author Mayberry, Curtis Lee
dc.contributor.committeeMember Ghovanloo, Maysam
dc.contributor.committeeMember Wang, Hua
dc.contributor.department Electrical and Computer Engineering
dc.date.accessioned 2015-01-12T20:53:39Z
dc.date.available 2015-01-12T20:53:39Z
dc.date.created 2014-12
dc.date.issued 2014-12-11
dc.date.submitted December 2014
dc.date.updated 2015-01-12T20:53:39Z
dc.description.abstract Gyroscopes are inertial sensors that measure the rate or angle of rotation. One of the most promising technologies for reaching a high-performance MEMS gyroscope has been development of the micro-hemispherical shell resonator. (μHSR) This thesis presents the electronic control and read-out interface that has been developed to turn the μHSR into a fully functional micro-hemispherical resonating gyroscope (μHRG) capable of measuring the rate of rotation. First, the μHSR was characterized, which both enabled the design of the interface and led to new insights into the linearity and feed-through characteristics of the μHSR. Then a detailed analysis of the rate mode interface including calculations and simulations was performed. This interface was then implemented on custom printed circuit boards for both the analog front-end and analog back-end, along with a custom on-board vacuum chamber and chassis to house the μHSR and interface electronics. Finally the performance of the rate mode gyroscope interface was characterized, showing a linear scale factor of 8.57 mv/deg/s, an angle random walk (ARW) of 34 deg/sqrt(hr) and a bias instability of 330 deg/hr.
dc.description.degree M.S.
dc.format.mimetype application/pdf
dc.identifier.uri http://hdl.handle.net/1853/53116
dc.language.iso en_US
dc.publisher Georgia Institute of Technology
dc.subject uHRG
dc.subject µHRG
dc.subject MEMS
dc.subject CVG
dc.subject Coriolis
dc.subject TIA
dc.subject AM
dc.subject FM
dc.subject Micro-hemispherical resonating gyroscope
dc.subject 3D-HARPSS
dc.subject High-Q
dc.subject Gyroscopes
dc.subject Gyroscopic instruments
dc.subject Gyroscope
dc.subject Vibratory
dc.subject Coriolis vibratory gyroscope
dc.subject Interface
dc.subject Circuits
dc.subject Transimpedance amplifier
dc.subject Rate integrating
dc.subject Inertial sensor
dc.subject Sensor
dc.subject Oscillator
dc.subject Analog
dc.subject Control
dc.subject Electrostatic
dc.subject Capacitive
dc.subject Noise
dc.subject Characterization
dc.subject Mode-matching
dc.subject Wine-glass
dc.subject Duffing
dc.subject Non-linearity
dc.subject Feed-through cancellation
dc.subject Vibratory gyroscopes
dc.subject Polysilicon
dc.title Interface circuits for readout and control of a micro-hemispherical resonating gyroscope
dc.type Text
dc.type.genre Thesis
dspace.entity.type Publication
local.contributor.advisor Ayazi, Farrokh
local.contributor.corporatename School of Electrical and Computer Engineering
local.contributor.corporatename College of Engineering
relation.isAdvisorOfPublication 298d0abc-b13a-4bb8-a8c5-ba73301c2436
relation.isOrgUnitOfPublication 5b7adef2-447c-4270-b9fc-846bd76f80f2
relation.isOrgUnitOfPublication 7c022d60-21d5-497c-b552-95e489a06569
thesis.degree.level Masters
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