Title:
Direct Write Nanolithography Using Heated Tip

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dc.contributor.patentcreator King, William P.
dc.contributor.patentcreator Henderson, Clifford L.
dc.date.accessioned 2017-05-12T14:28:34Z
dc.date.available 2017-05-12T14:28:34Z
dc.date.filed 8/30/2006
dc.date.issued 10/21/2008
dc.description.abstract A device for sculpting a substrate includes a vertically displaceable probe having a nano-scale dimensioned probe tip. A displacement mechanism is configured to adjust a vertical displacement between the probe tip and the substrate. A heating mechanism selectively heats the probe tip to a preselected temperature that is sufficient to cause a portion of the substrate in contact with the probe tip to decompose.
dc.description.assignee Georgia Tech Reasearch Corporation
dc.identifier.cpc B82Y10/00
dc.identifier.cpc G03F7/0002
dc.identifier.cpc B82Y40/00
dc.identifier.patentapplicationnumber 11/468409
dc.identifier.patentnumber 7439501
dc.identifier.uri http://hdl.handle.net/1853/57758
dc.identifier.uspc 250/306
dc.title Direct Write Nanolithography Using Heated Tip
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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